The recently improved SEM-ECCI technique can been used to image microstructural features, such as deformation bands, dislocations, twins, and grain boundaries at a large field of view. The fact that this method works in a SEM rather than TEM renders the ECCI approach suited for large scale and statistical mapping of microstructures at the grain and sub-grain scale.
ECCI is in our group mainly carried out in a Zeiss Crossbeam instrument consisting of a Gemini-type field emission gun (FEG) electron column. An acceleration voltage of 10 kV and a working distance of 6 mm are typically used.